| Course title | |||||
| ＭＥＭＳ [MEMS Technology] | |||||
| Course category | technology speciality courses,ets. | Requirement | Credit | 2 | |
| Department | Year | 3～4 | Semester | Spring | |
| Course type | Spring | Course code | 023530 | ||
| Instructor(s) | |||||
| 安藤 泰久, 岩見 健太郎 [ANDO Yasuhisa, IWAMI Kentaro] | |||||
| Facility affiliation | Faculty of Engineering | Office | Email address | ||
| Course description |
| This course is a general introduction to the field of MEMS（microelectromechanical systems）, with emphasis on micro / nanofabrication technologies and its applications. It is designed for junior (third year) undergraduate students. This course helps students understanding essential technical background for micro / nanofabrication. Moreover, principles in MEMS devices and phenomena upon with microchips will be introduced by instructors. In addition, through this course, students can learn how to understand principles and phenomena, and build a strong knowledge base. The course is divided into two halves. The first half of the term will be taught by Prof. Ando and focus on an introduction to silicon-based MEMS. The second half of the term will be taught by Prof. Iwami and applications and case studies of MEMS devices to various fields will be introduced. |
| Expected Learning |
| Course schedule |
|
Lec # Lecture Topics Sub Topics Part I: Silicon-based MEMS 1 Guidance 2 Introduction to MEMS: MEMS and micromachine 3 Outline of MEMS fabrication: Dry and wet etching 4 Actuators: electrostatic, piezoelectric and electromagnetic actuators 5 Microcantilever & SPM: AFM, STM 6 Examples of MEMS devices for measurements: 3D microstage, lateral force sensor 7 Micro/nano tribology: Issues in lubrication for MEMS Part II: Applications and Case studies 8 Sensor applications I: accelerometers, gyro sensors 9 Sensor applications II: pressure sensors 10 Optical MEMS I: Micromirror devices, optical communications 11 Optical MEMS II: Nanophotonic devices, plasmonics, radiation contorol 12 Lithography and beam applications: Electron beam lithography and focused ion beam 13 BioMEMS: medical applications, organ fusion, bio 3D printing 14 RF MEMS: IT and MEMS, IoT 15 Final Exam |
| Prerequisites |
| Required Text(s) and Materials |
| References |
| Assessment/Grading |
|
Attendance & quiz: 60% Final Exam: 40% |
| Message from instructor(s) |
| Course keywords |
| Office hours |
| Tue 10:00-17:00 |
| Remarks 1 |
| Remarks 2 |
| Related URL |
| Lecture Language |
| Japanese |
| Language Subject |
| Last update |
| 3/27/2017 11:48:36 AM |