Course title
電気電子工学特別講義（計測工学特別講義）   [Advanced Lectures on Electrical and Electronics Engineering]
Course category	technology speciality courses,ets.	Requirement		Credit	2
Department		Year	3～4	Semester	Spring
Course type	Spring	Course code	025708
Instructor(s)
羽持 満, 涌井 伸二   [HAMOCHI Mitsuru, WAKUI Shinji]
Facility affiliation	Graduate School of Engineering	Office		Email address

Course description

This 2-credit course provides students with the foundation for the electron microscope. Especially, countermeasures against nanometer order vibration are shown.

Expected Learning

Through investigations which are carried out at the industrial field, lecturer hopes that these knowledge help students for future.

Course schedule

Episode 1: Summary of electron microscope Episode 2: Disturbance elements which influence on performances Episode 3: Vibration theory and Fourier analysis Episode 4: Magnetic shielding effect Episode 5: Modeling using one degree-of-freedom Episode 6: Review. Measures of vibration against common machine. Episode 7: Modal analysis and mode shaping Episode 8: Rolling guide element and its spring feature in micro-displacement Episode 9: Problems of active control and beam deflection compensator Episode 10: Special nature of micro-vibration Episode 11: Review. Wide range dynamic vibration absorber Episode 12: Sub-angstrom measures of specimen holder Episode 13: ODS analysis and suppression of transmitted floor vibration Episode 14: Design of electron microscope considering stiffness from the view point of electron optics # Final examination

Prerequisites

Required Text(s) and Materials

Created document

References

Assessment/Grading

Final examination and attendance percentage with test

Message from instructor(s)

Course keywords

Electron microscope, Nanometer, Micro vibration, Modal analysis

Office hours

Remarks 1

Remarks 2

Related URL

Lecture Language

Language Subject

Last update

9/4/2017 5:12:10 PM