Course title
MEMS   [MEMS Technology]
Course category technology speciality courses,ets.  Requirement   Credit 2 
Department   Year 34  Semester Spring 
Course type Spring  Course code 023530
Instructor(s)
安藤 泰久, 岩見 健太郎   [ANDO Yasuhisa, IWAMI Kentaro]
Facility affiliation Faculty of Engineering Office   Email address

Course description
This course is a general introduction to the field of MEMS(microelectromechanical systems), with emphasis on micro / nanofabrication technologies and its applications. It is designed for junior (third year) undergraduate students. This course helps students understanding essential technical background for micro / nanofabrication. Moreover, principles in MEMS devices and phenomena upon with microchips will be introduced by instructors. In addition, through this course, students can learn how to understand principles and phenomena, and build a strong knowledge base. The course is divided into two halves. The first half of the term will be taught by Prof. Ando and focus on an introduction to silicon-based MEMS. The second half of the term will be taught by Prof. Iwami and applications and case studies of MEMS devices to various fields will be introduced.
Expected Learning
Course schedule
Lec # Lecture Topics Sub Topics
Part I: Silicon-based MEMS
1 Guidance
2 Introduction to MEMS: MEMS and micromachine
3 Outline of MEMS fabrication: Dry and wet etching
4 Actuators: electrostatic, piezoelectric and electromagnetic actuators
5 Microcantilever & SPM: AFM, STM
6 Examples of MEMS devices for measurements: 3D microstage, lateral force sensor
7 Micro/nano tribology: Issues in lubrication for MEMS
Part II: Applications and Case studies
8 Sensor applications I: accelerometers, gyro sensors
9 Sensor applications II: pressure sensors
10 Optical MEMS I: Micromirror devices, optical communications
11 Optical MEMS II: Nanophotonic devices, plasmonics, radiation contorol
12 Lithography and beam applications: Electron beam lithography and focused ion beam
13 BioMEMS: medical applications, organ fusion, bio 3D printing
14 RF MEMS: IT and MEMS, IoT
15 Final Exam
Prerequisites
Required Text(s) and Materials
References
Assessment/Grading
Drill & Quiz: 60%
Final Exam: 40%
Message from instructor(s)
Course keywords
Office hours
Tue 10:00-17:00
Remarks 1
Remarks 2
Related URL
Lecture Language
Japanese
Language Subject
Last update
4/4/2018 7:13:26 PM