Course title
電気電子工学特別講義(計測工学特別講義)   [Advanced Lectures on Electrical and Electronics Engineering]
Course category technology speciality courses,ets.  Requirement   Credit 2 
Department   Year 34  Semester Spring 
Course type Spring  Course code 025708
Instructor(s)
羽持 満, 涌井 伸二   [HAMOCHI Mitsuru, WAKUI Shinji]
Facility affiliation Graduate School of Engineering Office   Email address

Course description
This 2-credit course provides students with the foundation for the electron microscope.
Especially, countermeasures against nanometer order vibration are shown.
Expected Learning
Through investigations which are carried out at the industrial field, lecturer hopes that these knowledge help students for future.
Course schedule
Episode 1: Summary of electron microscope
Episode 2: Disturbance elements which influence on performances
Episode 3: Vibration theory and Fourier analysis
Episode 4: Magnetic shielding effect
Episode 5: Modeling using one degree-of-freedom
Episode 6: Review. Measures of vibration against common machine.
Episode 7: Modal analysis and mode shaping
Episode 8: Rolling guide element and its spring feature in micro-displacement
Episode 9: Problems of active control and beam deflection compensator
Episode 10: Special nature of micro-vibration
Episode 11: Review. Wide range dynamic vibration absorber
Episode 12: Sub-angstrom measures of specimen holder
Episode 13: ODS analysis and suppression of transmitted floor vibration
Episode 14: Design of electron microscope considering stiffness from the view point of electron optics
# Final examination
Prerequisites
Required Text(s) and Materials
Created document
References
Assessment/Grading
Final examination and attendance percentage with test
Message from instructor(s)
Course keywords
Electron microscope, Nanometer, Micro vibration, Modal analysis
Office hours
Remarks 1
Remarks 2
Related URL
Lecture Language
Language Subject
Last update
5/30/2018 3:46:15 PM