Course title
無機反応化学特論   [Advanced Inorganic Reaction]
Course category courses for master's programs  Requirement   Credit 2 
Department   Year   Semester 1st 
Course type 1st  Course code 1060202
Instructor(s)
村上 尚, 熊谷 義直   [MURAKAMI Hisashi, KUMAGAI Yoshinao]
Facility affiliation Faculty of Engineering Office afjgxte/L1151  Email address

Course description
In this lecture, we aim to understand the basic knowledges of thin film technologies such as fabrication of thin films, characterization and applications, which are indispensable to the present electronics area. Especially, we will study about crystal growth of semiconductor materials, basic theory of thin film formation and various characterization methods.
Expected Learning
A systematic understanding of thin-film fabrication technology, thin-film evaluation technology, and device application using thin films.
Corresponding criteria in the Diploma Policy: See the Curriculum maps.
Course schedule
#1 Introduction
#2 Basic of thin films
#3 Crystal growth of thin film 1
#4 Crystal growth of thin film 2
#5 Crystal growth of thin film 3
#6 Crystal growth of thin film 4
#7 Characterization of thin film 1
#8 Characterization of thin film 2
#9 Characterization of thin film 3
#10 Function and application of thin film 1
#11 Function and application of thin film 2
#12 Function and application of thin film 3
#13 Thin film growth of nitride semiconductors 1
#14 Thin film growth of nitride semiconductors 2
#15 Exercise
Prerequisites
Lectures will be given with consideration for students who do not specialize in inorganic and physical chemistry. However, since this lecture is for graduate students, it is assumed that students have basic knowledge of inorganic and physical chemistry at the undergraduate level. It is desirable that students have completed the semiconductor chemistry at undergraduate.
Required Text(s) and Materials

I will distribute the materials through moodle.
References
Nothing
Assessment/Grading
Attitude for the learning(10%), reports(10%), exercise score(80%)
Message from instructor(s)
Course keywords
Thin film engineering, Semiconductor crystal, epitaxial growth, vapor phase epitaxy
Office hours
10:00~16:00 on Monday
Remarks 1
Remarks 2
Related URL
Lecture Language
Japanese
Language Subject
Last update
1/6/2020 5:22:05 PM