| Course title | |||||
| ＭＥＭＳ [MEMS Technology] | |||||
| Course category | technology speciality courses | Requirement | Credit | 2 | |
| Department | Year | 3～4 | Semester | 1st | |
| Course type | 1st | Course code | 023577 | ||
| Instructor(s) | |||||
| 安藤 泰久 [ANDO Yasuhisa] | |||||
| Facility affiliation | Faculty of Engineering | Office | afjgxte/L1151 | Email address | |
| Course description |
|
This course is a general introduction to the field of MEMS（microelectromechanical systems）, with emphasis on micro / nanofabrication technologies and its applications. It is designed for junior (third year) undergraduate students. This course helps students understanding essential technical background for micro / nanofabrication. Moreover, principles in MEMS devices and phenomena upon with microchips will be introduced by instructors. In addition, through this course, students can learn how to understand principles and phenomena, and build a strong knowledge base. The course is divided into two halves. The first half of the term will be taught by Prof. Ando and focus on an introduction to silicon-based MEMS. The second half of the term will be taught by Prof. Iwami and applications and case studies of MEMS devices to various fields will be introduced. This course is an elective subjects in the curriculum of the M2 Course of the MSE department. class code: fimsr4y |
| Expected Learning |
|
The standards of this lecture are : to understand a basic MEMS technology. to understand characteristics of various microfabrication technologies. to understand the principles of representative actuators and transducers. to understand physics in micro/nanoscale that is applicable in MEMS. Corresponding criteria in the Diploma policy: See the Curriculum maps. |
| Course schedule |
|
Lec # Lecture Topics Sub Topics Part I: Silicon-based MEMS 1 Guidance 2 Introduction to MEMS: MEMS and micromachine 3 Outline of MEMS fabrication: Dry and wet etching 4 Actuators: electrostatic, piezoelectric and electromagnetic actuators 5 Microcantilever & SPM: AFM, STM 6 Examples of MEMS devices for measurements: 3D microstage, lateral force sensor 7 Micro/nano tribology: Issues in lubrication for MEMS Part II: Applications and Case studies 8 Lithography and beam applications: Electron beam lithography and focused ion beam 9 Case study :MEMS accelerometer 1) Principle and implementation 10 Case study :MEMS accelerometer 2) Analysis of actuators, springs, and capacitive readouts based on virtual displacement method 11 Case study :MEMS accelerometer 3) Mechanical and electrical sensitivity, and its improvement methods 12 Case study :Mirror devices 1) Principle and applications 13 Case study :Mirror devices 2) Torsion bars and scanning angles 14 MEMS applications: What is the key to commercialization? 15 Revision Final Exam |
| Prerequisites |
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This is part of the M2 Course, and its completion is recommended for students in the Department of Mechanical Systems Engineering. In addition to 30 hours that students spend in the class, students are recommended to prepare for and revise the lectures, spending the standard amount of time as specified by the University and using the lecture handouts. |
| Required Text(s) and Materials |
| PDFs are distributed via Moodle or Classroom |
| References |
| Assessment/Grading |
|
Drill & Quiz: 60% Final Exam or Report: 40% |
| Message from instructor(s) |
| Course keywords |
| Office hours |
| Tue 10:00-17:00 |
| Remarks 1 |
| Remarks 2 |
| Related URL |
| Lecture Language |
| Japanese |
| Language Subject |
| Last update |
| 3/22/2021 5:45:37 PM |